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MMS223

Overview

MMS223 series of fast steering mirrors, with 5mm mirror diameter, are products manufactured based on MEMS technology for low-orbit satellite, airborne, or shipboard laser communication systems. As a core component of laser communication terminals, they have advantages such as lightweight, small size, low power consumption, excellent surface profile, long lifespan without fatigue decay, serving as a replacement for the last generation of piezoelectric fast steering mirrors.

MMS223-Catalog

  • Product ID
  • lmage
  • Mirror Diameter
    (mm)
  • Driven Mode
     
  • Mirror Surface Rms
    (nm)
  • Mirror Surface Rms
    (λ@632nm)
  • Resonant Frequency
    (kHz)
  • Mechanical Angle
    (mrad@55V)
  • Open-Loop Linearity
     
  • Repeatability Positioning Accuracy
    (μrad)
  • Mirror Coating
     
  • Mirror Reflectance
    (@1550nm)
  • Package Size
    (mm)
  • Maximum Working Voltage
    (V)
  • Standard Power
    (mW)
  • 5

    Quasi-static

    ≤30nm

    ≤1/20

    0.5

    X: ±10.7
    Y: ±10.7

    99.9%

    ≤10

    Au

    97.5%

    35 x 35 x 6

    ±110

    120

  • 5

    Quasi-static

    ≤30nm

    ≤1/20

    0.7

    X: ±7
    Y: ±7

    99.9%

    ≤10

    Au

    97.5%

    41 x 41 x 5.5

    ±110

    120

  • 5

    Quasi-static

    ≤30nm

    ≤1/20

    0.55

    X: ±12
    Y: ±12

    99.9%

    ≤10

    Au

    97.5%

    41 x 41 x 5.5

    ±110

    120

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