Main Technology-MExpert Technology

Multiple Core Technology Breakthroughs

With its Self-Owned developed and international leading MEMS fast steering mirror technology, MExpert has provided professional support for the construction of China's space laser communication network.

Mirror sizes range from 1 to 15 mm, Resonant frequencies between 0.1 and 30 kHz

Self-Owned MEMS
Design

The unique dual-layer stacked MEMS architecture integrates high-performance hidden piezoelectric actuators in a collaborative design, creating large-diameter MEMS Mirrorproducts with high frequency and high duty cycle.
RMS surface shape ≤ 20 nm @ 10 mm

Unique Surface-Tuning technology

Wafer-level nano-scale surface tuning process, combined with multi-layer composite film stress control technology, pioneers a high surface accuracy fabrication method for high aspect ratio MEMS mirrors.
Repeatability ≤ 2 μrad @ 3σ, Open-loop linearity ≥ 99.9%, Open-loop control bandwidth ≥ 2 kHz

Advanced Piezoelectric Driving Technology

Utilizing cutting-edge quasi-single-crystal high-doped piezoelectric functional thin-film actuation technology, combined with a second-order feedforward driving algorithm, achieves high-precision, low-latency positioning in quasi-static mode.
Over 20 billion times full-range accelerated lifespan tests without degradation

High-Reliability Quality Design

High-stability single-crystal silicon substrates, combined with shock-resistant MEMS structural design and high-reliability packaging, ensure space-grade lifespan and reliability.

Independent and Controllable Production Process

MExpert's MEMS products originates from SIMIT. Production relies on a domestically leading and internationally advanced 8-inch MEMS mass production platform, which has completed ISO9001/14001/45001 system certification. Packaging and testing are carried out on high-standard independent production lines. The products have passed multiple tests conducted by authoritative institutions and are truly domestically advanced, independently controllable, and original MEMS piezoelectric Mirror products.

8-inch MEMS

8-inch MEMS advanced MEMS production platform
5 ＋

Quality system meets standards
10 ＋

Independent intellectual property rights (IPR)

Leading R&D Platform

Based on domestically leading and internationally advanced MEMS R&D platform
Original Technology From SIMIT

Relying on the innovation system of tSIMIt
Integrating Sensor Technology Platform

Integrating complete capabilities of chip processing, packaging, and testing