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Professional manufacturer of Micro-Electro-Mechanical Systems (MEMS) device
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Provider of next-generation large-aperture piezoelectric MEMS fast steering mirror
Learn more about MExpert's products
MExpert possesses a complete set of core technologies for the independent design, manufacturing process, and packaging testing of MEMS mirrors. We can provide MEMS mirror product development technologies covering various application scenarios, including laser communication, LiDAR, and laser scanning.
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Laser Communication
MExpert, with its independently developed and internationally leading MEMS FSM (fast steering mirror) technology, has provided robust support for the construction of China's space laser communication network. The piezoelectric-driven fast steering mirror based on MEMS technology features miniaturization, lightweight, low power consumption, high precision, fast response, and high reliability. It has become the preferred solution for achieving long-distance stable laser communication links.
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LiDAR
MExpert's MEMS mirror stands out in the field of Light Detection and Ranging (LiDAR) applications, effectively enhancing system performance, reducing deployment costs, accelerating precise data collection, and point cloud imaging.
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Laser Projection
The high-frequency MEMS mirror from MExpert boasts advantages such as high frequency, low power consumption, small size, and light weight. Based on the Lissajous scanning method, it can achieve a display resolution of over 720P and play a crucial role as a key component in lightweight VR, AR, XR, or micro projectors. It is one of the main technological routes for future laser projection.
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Scientific Research
MExpert's self-developed piezoelectric-driven MEMS mirror, with its lightweight, high-frequency, reliable, and flexible characteristics, can play a significant role in scientific research equipment and academic frontier fields. Currently, MExpert's MEMS mirror has been widely used in optical cameras, scanning imaging, laser aiming, and other fields.
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Laser Communication
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LiDAR
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Laser Projection
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Scientific Research
Main Technology
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Self-Owned MEMS Design
The unique dual-layer stacked MEMS architecture integrates high-performance hidden piezoelectric actuators in a collaborative design, creating large-diameter MEMS Mirrorproducts with high frequency and high duty cycle.
Mirror sizes range from 1 to 15 mm, Resonant frequencies between 0.1 and 30 kHz.
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Unique Surface-Tuning Technology
Wafer-level nano-scale surface tuning process, combined with multi-layer composite film stress control technology, pioneers a high surface accuracy fabrication method for high aspect ratio MEMS mirrors.
RMS surface shape ≤ 20 nm @ 10 mm
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Advanced Piezoelectric Driving Technology
Utilizing cutting-edge quasi-single-crystal high-doped piezoelectric functional thin-film actuation technology, combined with a second-order feedforward driving algorithm, achieves high-precision, low-latency positioning in quasi-static mode.
Repeatability ≤ 2 μrad @ 3σ, Open-loop linearity ≥ 99.9%, Open-loop control bandwidth ≥ 2 kHz
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High-Reliability Quality Design
High-stability single-crystal silicon substrates, combined with shock-resistant MEMS structural design and high-reliability packaging, ensure space-grade lifespan and reliability.
Over 20 billion times full-range accelerated lifespan tests without degradation
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